11573/1698891 - 2023 -
On the dependency of the electromechanical response of rotary MEMS/NEMS on their embedded flexure hinges' geometry Buzzin, Alessio; Giannini, Lorenzo; Bocchetta, Gabriele; Notargiacomo, Andrea; Giovine, Ennio; Scorza, Andrea; Asquini, Rita; De Cesare, Giampiero; Belfiore, Nicola Pio - 01a Articolo in rivista
rivista: MICROMACHINES (Basel : Molecular Diversity Preservation Internationa) pp. 1-16 - issn: 2072-666X - wos: (0) - scopus: 2-s2.0-85180669333 (0)